Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiatorKAWASHIMA, Kenji; KATO, Tomonori; SAWAMOTO, Koichi et al.Precision engineering. 2007, Vol 31, Num 2, pp 139-145, issn 0141-6359, 7 p.Article

Active control of a pneumatic isolation table using model following control and a pressure differentiatorKATO, Tomonori; KAWASHIMA, Kenji; SAWAMOTO, Koichi et al.Precision engineering. 2007, Vol 31, Num 3, pp 269-275, issn 0141-6359, 7 p.Article